Transient X-ray Spectroscopy & Diffraction
Max Planck Research Group Michael Zürch
Transient X-ray Spectroscopy & Diffraction
Max Planck Research Group Michael Zürch

News Post
Paper on wavelength-scale ptychographic coherent diffractive imaging published
Feb 19 2019

Our paper “Wavelength-scale ptychographic coherent diffractive imaging using a high-order harmonic source”, which was the result of a collaboration between several Jena-based groups collaborating in a Forschergruppe in the State of Thuringia (2015 FGR 0094), has just been published in Scientific Reports. In this work, a full-field imaging resolution of 45 nm, corresponding to 2.5 wavelengths, was achieved using an advanced XUV source at the Institute of Applied Physics at FSU Jena. For better comparison of results in XUV imaging a Rayleigh-type criterion is used as a direct and unambiguous resolution metric for high-resolution table-top setup. This reliably qualifes this imaging system for real-world applications e.g. in biological sciences, material sciences, imaging integrated circuits and semiconductor mask inspection.


High resolution ptychographic reconstruction. (a) Reconstructed object over a field of view 100 µm². The inset shows parts of the innermost ring (with smallest feature of 20 nm) being resolved. The number ‘1’ in the inset with a size of 50 nm ×250 nm is resolved as well. (b) Cross-sections along the white vertical and horizontal bars in the inset of (a) demonstrate half-pitch resolutions of 45 nm and 60 nm. (c) The reconstructed probe beam intensity shown in log. scale displays a horizontally elongated XUV beam. Multiple rings due to difraction from the beam constraining pinhole are also visible. (d) The reconstructed probe phase. Scale bars in (c,d) are 5 µm.
Original link to the journal:
https://www.nature.com/articles/s41598-019-38501-1